| resin | metal | Brittle material | ||
| Material | Polyimide Polyether Nether Polybenzoine Diesel Polyacetal Polyamide | Stainless steel aluminum brass rare metal (Titan, Tantal, Platinum, etc.) | Machinable ceramics quartz glass silicon zirconia alumina | |
|  | Minimum diameter / φDμm | φ10μm | φ10μm | φ30μm | 
| depth | ~φ100μm=5D φ100μm~=10D | ~φ100μm=5D φ100μm~=10D | ~φ100μm=5D φ100μm~=10D | |
|   | Minimum width / Wμm | 10μm | 10μm | 30μm | 
| width | ~100μm=2W 100μm~=5W | ~100μm=2W 100μm~=5W | ~100μm=2W 100μm~=5W | |
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